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Chanida Puttichaem. Scanning electron microscopy and energy-dispersive X-ray spectroscopy characterization of ultra thin diamond-like carbon film on magnetic recording head. Master's Degree(Materials and Textile Technology). Thammasat University. Thammasat University Library. : Thammasat University, 2021.
Scanning electron microscopy and energy-dispersive X-ray spectroscopy characterization of ultra thin diamond-like carbon film on magnetic recording head
การศึกษาลักษณะเฉพาะของฟิล์มบางคาร์บอนเสมือนเพชรในผลิตภัณฑ์หัวอ่าน-เขียนด้วยกล้องจุลทรรศน์อิเล็กตรอนแบบส่องกราดและอุปกรณ์ตรวจจับสัญญาณเอกซ์เรย์
Name: Chanida Puttichaem
keyword:
Scanning electron microscope (SEM)
Abstract:
The uses of surface sensitive SEM/EDX method to characterize the chemistry of ultra-thin diamond-like carbon films in magnetic recording heads is discussed leading in a novel, high throughput technique to analyses substrate-specific, semi-quantitative silicon nitride/DLC stack composition of protective films widely uses in the magnetic recording head recording manufacturing in hard disk drives industry and at Angstrom scale. In this work, SEM/EDX output result is use as a correlative technique to TEM in order to provide the direct and metrology gauge-capable film thickness using multiple regression models allow the thickness predictions to be made base on film constituents. Moreover, the topography information of substrate/film after wear stress test is correlatively and compositionally described based on elemental and chemical changes detected via the SEM/EDX method without the need for time consume and elaborate cross-sectional workflows. Wear track regions of the substrate reveals the depletion in carbon, as well as Si and N in the most critical wear damage case, also indicating the form of iron oxide. Variation analysis of film composition around industry level thicknesses around industry thicknesses level shown a complex interplay between silicon, nitrogen and oxygen which has been reflected mathematically in the regression model, as well as used to provide meaningful insights into the as-deposited physics of the film
Thammasat University. Thammasat University Library
Address:
BANGKOK
Email:
preserv@tu.ac.th
Name: Kittipong Chainok
Role:
advisor
Name: Winya Dungkaew
Role:
co-advisor
Created:
2021
Modified:
2023-02-08
Issued:
2023-02-08
วิทยานิพนธ์/Thesis
application/pdf
eng
DegreeName: Master of Science
Level: Master's Degree
Descipline: Materials and Textile Technology
Grantor: Thammasat University
©copyrights Thammasat University
RightsAccess:
ใช้เวลา
-0.957503 วินาที
Chanida Puttichaem
| Title | Contributor | Type |
|---|---|---|
| Scanning electron microscopy and energy-dispersive X-ray spectroscopy characterization of ultra thin diamond-like carbon film on magnetic recording head
มหาวิทยาลัยธรรมศาสตร์ Chanida Puttichaem | Kittipong Chainok Winya Dungkaew | วิทยานิพนธ์/Thesis |
Kittipong Chainok
Winya Dungkaew