Abstract:
This thesis presents the study and simulation of piezoelectric effect on Quartz Crystal Microbalance(QCM) using finite element program namely COMSOL. First, the QCM behaviors have been simulated comparing with the theoretical model. It was found that the simulation results are corresponded to the theoretical one. Then, the effect of electrode size, mass position on QCM, non-uniform mass, and bias-voltage on QCM's vibration have been investigated. It was found that the resonance frequency increases as electrode size decreases. The result suggests that the QCM's electrode should be small to increase the sensitivity of the measurement. The simulation results also indicate that the nearer of mass to QCM center the higher sensitivity of QCM was obtained. The sensitivity of the QCM continuously decreases as the mass locates far from the center of the electrode. This implies that the mass should be put at the position close to the center of the electrode for efficiently detection of mass. The effect of changing voltage shows that the displacement of QCM relatively increases with the voltage. The result indicates that applying high voltage to QCM might effect the attachment of molecules on the QCM surface. Finally, the simulation of non-uniform model shows that if the property of mass attached on the QCM is the same as gold, the QCM's resonant frequency will decrease at the beginning an then increases as the mass increase, if the material property is the same as polystyrene the resonant frequency will decrease as the mass increase